Invention Grant
- Patent Title: Slurry composition and method for polishing substrate
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Application No.: US15126543Application Date: 2015-03-17
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Publication No.: US09914853B2Publication Date: 2018-03-13
- Inventor: Tsuyoshi Masuda , Hiroshi Kitamura , Yoshiyuki Matsumura
- Applicant: Nihon Cabot Microelectronics K.K.
- Applicant Address: JP
- Assignee: Nihon Cabot Microelectronics K.K.
- Current Assignee: Nihon Cabot Microelectronics K.K.
- Current Assignee Address: JP
- Agent Thomas Omholt; Erika S. Wilson
- Priority: JP2014-053262 20140317
- International Application: PCT/JP2015/057924 WO 20150317
- International Announcement: WO2015/141687 WO 20150924
- Main IPC: C09G1/02
- IPC: C09G1/02 ; H01L21/306 ; H01L21/02 ; C09K3/14

Abstract:
Provided are a slurry composition to be used in chemical mechanical polishing (CMP), and a method for polishing a substrate. This slurry composition contains water, abrasive grains, and an alkylene polyalkylene oxide amine polymer having a solubility parameter in a range of 9-10. A preferred alkylene polyalkylene oxide amine polymer is given by general formula (1). (In general formula (1), m and n are positive integers, and A and R are alkylene oxide groups.)
Public/Granted literature
- US20170037278A1 SLURRY COMPOSITION AND METHOD FOR POLISHING SUBSTRATE Public/Granted day:2017-02-09
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