Invention Grant
- Patent Title: Additive C capable of changing microvia-filling method by TSV copper plating, and electroplating solution containing same
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Application No.: US14908778Application Date: 2013-12-10
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Publication No.: US09915005B2Publication Date: 2018-03-13
- Inventor: Su Wang , Xianxian Yu , Li Ma , Yanyan Li
- Applicant: SHANGHAI SINYANG SEMICONDUCTOR MATERIALS CO., LTD.
- Applicant Address: CN
- Assignee: SHANGHAI SINYANG SEMICONDUCTOR MATERIALS CO., LTD.
- Current Assignee: SHANGHAI SINYANG SEMICONDUCTOR MATERIALS CO., LTD.
- Current Assignee Address: CN
- Agency: Ostrolenk Faber LLP
- Priority: CN201310343305 20130808
- International Application: PCT/CN2013/001525 WO 20131210
- International Announcement: WO2015/017958 WO 20150212
- Main IPC: C25D3/38
- IPC: C25D3/38 ; C25D7/12 ; H01L21/288 ; H01L21/768

Abstract:
An additive C capable of changing microvia-filling method by TSV copper plating, and electroplating solution containing same. The additive C contains by mass percentage: 5%-10%, one of polyethylene glycol or polyvinyl alcohol with the molecular weight of 200-100,000, or the mixture with different molecular weight thereof; 0.001%-0.5% isomer of the surfactant which including the alkylphenol polyoxyethylene ether or fatty alcohol-polyoxyethylene ether; and the solvent is water. The electroplating solution containing the additive C could be used for microvia-filling by TSV copper plating, the electroplating current distribution could be adjusted reasonably to realize the smooth transition between the conformal and bottom-up plating, so as to reduce the possibility of the seam or void in the coating, realize the high-speed electroplating, reduce the thickness of the copper layer, reduce the TSV plating duration and the cost of the chemical mechanical polishing (CMP), and significantly improve the production efficiency.
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