Rotation rate sensor and method for operating a rotation rate sensor
Abstract:
A rotation rate sensor includes a substrate having a main extension plane and a Coriolis element, in which the rotation rate sensor is configured so that the Coriolis element is excitable with the aid of an excitation arrangement to carry out an excitation oscillation along a first direction and in parallel to the main extension plane, the rotation rate sensor including a compensation element for exerting a compensation force, the compensation force having a non-linear dependence on the excitation oscillation.
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