Invention Grant
- Patent Title: Biochip with biosensors and fluidic devices
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Application No.: US14603925Application Date: 2015-01-23
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Publication No.: US09915630B2Publication Date: 2018-03-13
- Inventor: Yi-Shao Liu , Chun-Wen Cheng , Chun-Ren Cheng
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: G01N21/75
- IPC: G01N21/75 ; G01N27/414 ; G03F7/20 ; B01L3/00 ; G01N33/543 ; G03F7/00

Abstract:
A biochip includes a substrate, where the substrate includes at least one hole extending from a first surface of the substrate to a second surface of the substrate opposite the first surface, and where the substrate comprises a microfluidic channel pattern. The biochip further includes a surface modification layer over the substrate. Additionally, the biochip includes a sensing wafer bonded to the substrate, where the sensing wafer has one or more modified surface patterns having different surface properties from each other.
Public/Granted literature
- US20150139857A1 BIOCHIP WITH BIOSENSORS AND FLUIDIC DEVICES Public/Granted day:2015-05-21
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