Invention Grant
- Patent Title: Lithography apparatus and article manufacturing method
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Application No.: US14730568Application Date: 2015-06-04
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Publication No.: US09915881B2Publication Date: 2018-03-13
- Inventor: Yoshikazu Miyajima , Hitoshi Nakano
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Rossi, Kimms & McDowell LLP
- Priority: JP2014-118132 20140606
- Main IPC: G03B27/04
- IPC: G03B27/04 ; G03F7/20 ; G03F7/00

Abstract:
A lithography apparatus includes an original conveying path, a substrate conveying path, and a plurality of patterning devices each configured to perform patterning on a substrate using an original. The plurality of patterning devices are arranged in two rows. The substrate conveying path is provided between and along the two rows. The original conveying path is provided in each of two rows between and along which the two rows of the patterning devices are arranged.
Public/Granted literature
- US20150355558A1 LITHOGRAPHY APPARATUS AND ARTICLE MANUFACTURING METHOD Public/Granted day:2015-12-10
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