Invention Grant
- Patent Title: High temperature fine grain aluminum heater
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Application No.: US12017285Application Date: 2008-01-21
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Publication No.: US09917001B2Publication Date: 2018-03-13
- Inventor: Abhi Desai , Robert T. Hirahara , Calvin Augason
- Applicant: Abhi Desai , Robert T. Hirahara , Calvin Augason
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: H05B3/68
- IPC: H05B3/68 ; H01L21/687 ; H01L21/67

Abstract:
An aluminum heated substrate support suitable for use in high temperature substrate processing systems and method for fabricating the same are provided. In one embodiment, an aluminum heated substrate support can include an aluminum body, a stem coupled to the body and a heating element disposed in the body. The body has an average grain size less than about 250 μm. In some embodiments, the stem to body joint is a fully penetrated lap weld that promotes service life of the substrate support.
Public/Granted literature
- US20090184093A1 HIGH TEMPERATURE FINE GRAIN ALUMINUM HEATER Public/Granted day:2009-07-23
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