Invention Grant
- Patent Title: Integrated circuits with aluminum via structures and methods for fabricating the same
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Application No.: US14985256Application Date: 2015-12-30
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Publication No.: US09917027B2Publication Date: 2018-03-13
- Inventor: Wanbing Yi , Mahesh Bhatkar , Chin Chuan Neo , Juan Boon Tan
- Applicant: Globalfoundries Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Lorenz & Kopf, LLP
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L21/311 ; H01L21/768 ; H01L23/528 ; H01L23/31 ; H01L23/532 ; H01L21/56 ; H01L23/29

Abstract:
A method for fabricating an integrated circuit includes forming a first opening in an upper dielectric layer, the first opening having a first width, forming a second opening in a lower dielectric layer, the lower dielectric layer being below the upper dielectric layer, the second opening having a second width that is narrower than the first width, the second opening being substantially centered underneath the first opening so as to form a stepped via structure, conformally depositing an aluminum material layer in the stepped via structure and over the upper dielectric layer, and forming a passivation layer over the aluminum material layer.
Public/Granted literature
- US20170194229A1 INTEGRATED CIRCUITS WITH ALUMINUM VIA STRUCTURES AND METHODS FOR FABRICATING THE SAME Public/Granted day:2017-07-06
Information query
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