Invention Grant
- Patent Title: Coarse grid design methods and structures
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Application No.: US15150152Application Date: 2016-05-09
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Publication No.: US09917056B2Publication Date: 2018-03-13
- Inventor: Michael C. Smayling , Scott T. Becker
- Applicant: Tela Innovations, Inc.
- Applicant Address: US CA Los Gatos
- Assignee: Tela Innovations, Inc.
- Current Assignee: Tela Innovations, Inc.
- Current Assignee Address: US CA Los Gatos
- Agency: Martine Penilla Group, LLP
- Main IPC: H01L23/528
- IPC: H01L23/528 ; H01L21/027 ; H01L27/02 ; G03F7/20 ; G06F17/50 ; H01L27/105 ; H01L21/8234

Abstract:
A layer of a mask material is deposited on a substrate. A beam of energy is scanned across the mask material in a rasterized linear pattern and in accordance with a scan pitch that is based on a pitch of conductive structure segments to be formed on the substrate. The beam of energy is defined to transform the mask material upon which the beam of energy is incident into a removable state. During scanning the beam of energy across the mask material, the beam of energy is turned on at locations where a conductive structure is to be formed on the substrate, and the beam of energy is turned off at locations where a conductive structure is not to be formed on the substrate.
Public/Granted literature
- US20160254223A1 Coarse Grid Design Methods and Structures Public/Granted day:2016-09-01
Information query
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