Semiconductor device including finFET and fin varactor
Abstract:
A semiconductor device includes a semiconductor substrate having a fin-type field effect transistor (finFET) on a first region and a fin varactor on a second region. The finFET includes a first semiconductor fin that extends from an upper finFET surface thereof to the upper surface of the first region to define a first total fin height. The fin varactor includes a second semiconductor fin that extends from an upper varactor surface thereof to the upper surface of the second region to define a second total fin height that is different from the first total fin height of the finFET.
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