Invention Grant
- Patent Title: III-V semiconductor CMOS FinFET device
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Application No.: US15284759Application Date: 2016-10-04
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Publication No.: US09917089B2Publication Date: 2018-03-13
- Inventor: Hemanth Jagannathan , Alexander Reznicek , Devendra K. Sadana , Charan V. Surisetty
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L27/092 ; H01L29/20 ; H01L29/267 ; H01L29/165 ; H01L29/08 ; H01L29/10 ; H01L21/8238 ; H01L21/02 ; H01L29/78

Abstract:
A method for forming a semiconductor device comprises forming an insulator layer on a semiconductor substrate, removing portions of the insulator layer to form a first cavity and a second cavity, the first cavity exposing a first portion of the semiconductor substrate an the second cavity exposing a second portion of the semiconductor substrate, growing a first semiconductor material in the first cavity and the second cavity. Growing a second semiconductor material on the first semiconductor material in the first cavity and the second cavity, growing a third semiconductor material on the second semiconductor material in the first cavity and the second cavity. Forming a mask over the third semiconductor material in the first cavity, removing the third semiconductor material from the second cavity to expose the second semiconductor material in the second cavity, and growing a fourth semiconductor material on the second semiconductor material in the second cavity.
Public/Granted literature
- US20170229459A1 III-V SEMICONDUCTOR CMOS FINFET DEVICE Public/Granted day:2017-08-10
Information query
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