Invention Grant
- Patent Title: Inter-plane offset in backside contact via structures for a three-dimensional memory device
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Application No.: US15195446Application Date: 2016-06-28
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Publication No.: US09917093B2Publication Date: 2018-03-13
- Inventor: Cheng-Chung Chu , Jayavel Pachamuthu , Tuan Pham , Fumitoshi Ito , Masaaki Higashitani
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L29/788
- IPC: H01L29/788 ; H01L27/11556 ; H01L23/522 ; H01L21/22 ; H01L21/768 ; H01L27/11519 ; H01L27/11565 ; H01L27/1157 ; H01L27/11573 ; H01L27/11582 ; H01L29/417

Abstract:
A three-dimensional memory device includes a plurality of planes, each having a respective alternating stack, strings of memory stack structures which extends through the respective alternating stack, and backside contact via structures vertically extending through the respective alternating stack, extending generally along the first horizontal direction, and laterally separating neighboring pairs of strings of memory stack structures along a second horizontal direction. A first plane includes a first plurality of strings that are laterally spaced apart along the second horizontal direction by a first plurality of backside contact via structures. A second plane laterally shifted from the first plane along the first horizontal direction and including a second plurality of strings that are laterally spaced apart along the second horizontal direction by a second plurality of backside contact via structures which are laterally offset with respect the first plurality of backside contact via structures along the second horizontal direction.
Public/Granted literature
- US20170373078A1 INTER-PLANE OFFSET IN BACKSIDE CONTACT VIA STRUCTURES FOR A THREE-DIMENSIONAL MEMORY DEVICE Public/Granted day:2017-12-28
Information query
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