Invention Grant
- Patent Title: Semiconductor memory device and method for manufacturing same
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Application No.: US14633405Application Date: 2015-02-27
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Publication No.: US09917096B2Publication Date: 2018-03-13
- Inventor: Takeshi Kamigaichi
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L29/792 ; H01L27/11582 ; H01L29/45 ; H01L29/49 ; H01L21/28 ; H01L27/115

Abstract:
According to one embodiment, a semiconductor memory device includes a stacked body including a plurality of electrode layers and a plurality of inter-layer insulating layers each provided between the plurality of electrode layers; and a columnar portion penetrating the stacked body and extending in a stacking direction of the stacked body. The columnar portion includes a channel body extending in the stacking direction; and a charge storage film provided between the channel body and each of the electrode layers. Each of the electrode layers includes an edge portion provided closer on a central axis side of the columnar portion than the inter-layer insulating layers. The charge storage film covers the edge portion of each of the electrode layers and separated from each other in the stacking direction.
Public/Granted literature
- US20160071871A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME Public/Granted day:2016-03-10
Information query
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