Invention Grant
- Patent Title: Three-dimensional NAND device containing support pedestal structures for a buried source line and method of making the same
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Application No.: US15354116Application Date: 2016-11-17
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Publication No.: US09917100B2Publication Date: 2018-03-13
- Inventor: Tong Zhang , Johann Alsmeier , James Kai , Jin Liu , Yanli Zhang
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Plano
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Plano
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L23/528 ; H01L27/11582 ; H01L21/768 ; H01L27/11519 ; H01L27/11556 ; H01L27/11565

Abstract:
A three-dimensional memory device includes an alternating stack of electrically conductive layers and insulating layers located over a substrate, an array of memory stack structures. A source conductive line structure is provided between the substrate and the alternating stack. The source conductive line structure includes a plurality of parallel conductive rail structures extending along a same horizontal direction and adjoined to a common conductive straddling structure. Each memory stack structure straddles a vertical interface between a conductive rail structure and a support matrix. A semiconductor channel in each memory stack structure contacts a respective conductive rail structure and the support matrix.
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