Invention Grant
- Patent Title: Semiconductor device
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Application No.: US15039725Application Date: 2014-11-26
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Publication No.: US09917102B2Publication Date: 2018-03-13
- Inventor: Katsuhisa Nagao , Noriaki Kawamoto
- Applicant: ROHM CO., LTD.
- Applicant Address: JP Kyoto
- Assignee: ROHM CO., LTD.
- Current Assignee: ROHM CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Hamre, Schumann, Mueller & Larson, P.C.
- Priority: JP2013-246474 20131128
- International Application: PCT/JP2014/081273 WO 20141126
- International Announcement: WO2015/080162 WO 20150604
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L27/118 ; H01L29/16 ; H01L29/739 ; H01L29/423 ; H01L29/78 ; H01L23/528 ; H01L29/06 ; H01L29/10 ; H01L23/532

Abstract:
A semiconductor device (1) is manufactured which includes a SiC epitaxial layer (28), a plurality of transistor cells (18) that are formed in the SiC epitaxial layer (28) and that are subjected to ON/OFF control by a predetermined control voltage, a gate electrode (19) that faces a channel region (32) of the transistor cells (18) in which a channel is formed when the semiconductor device (1) is in an ON state, a gate metal (44) that is exposed at the topmost surface for electrical connection with the outside: and that is electrically connected to the gate electrode (19) while being physically separated from the gate electrode (19), and a built-in resistor (21) that is made of polysilicon and that is disposed below the gate metal (44) so as to electrically connect the gate metal (44) and the gate electrode (19) together.
Public/Granted literature
- US20160379992A1 SEMICONDUCTOR DEVICE Public/Granted day:2016-12-29
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