Invention Grant
- Patent Title: Photo electric converter imaging system and method for manufacturing photoelectric converter
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Application No.: US15191342Application Date: 2016-06-23
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Publication No.: US09917140B2Publication Date: 2018-03-13
- Inventor: Nobuhiko Sato
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon U.S.A., Inc. IP Division
- Priority: JP2014-163208 20140808
- Main IPC: H01L27/30
- IPC: H01L27/30 ; H04N5/335 ; H01L51/44 ; H01L27/146

Abstract:
A method for manufacturing a photoelectric converter includes a first step of preparing a semiconductor substrate including a metal oxide semiconductor (MOS) transistor, a second step of forming a plurality of interlayer insulating films above the semiconductor substrate, and a third step of forming a photoelectric conversion portion above the semiconductor substrate. The second step includes a step of forming a first film containing hydrogen. The third step includes a step of forming a first electrode, a step of forming a photoelectric conversion film, and a step of forming a second electrode. The method includes a step of performing heat treatment between the step of forming the first film and the step of forming the photoelectric conversion film.
Public/Granted literature
- US20160307966A1 PHOTO ELECTRIC CONVERTER IMAGING SYSTEM AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERTER Public/Granted day:2016-10-20
Information query
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