Invention Grant
- Patent Title: Integrated capacitor and method for producing the same
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Application No.: US15249750Application Date: 2016-08-29
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Publication No.: US09917146B2Publication Date: 2018-03-13
- Inventor: Anton Bauer , Tobias Erlbacher , Holger Schwarzmann
- Applicant: Fraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
- Applicant Address: DE Munich
- Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee: FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V.
- Current Assignee Address: DE Munich
- Agency: Keating & Bennett, LLP
- Priority: DE102013019912 20131122; DE102014200869 20140117
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L49/02 ; H01L21/283 ; H01L29/66 ; H01L27/06 ; H01L27/08 ; H01L29/94
Abstract:
An integrated capacitor includes a substrate with a first main surface area and an opposing second main surface area. A capacitor structure with a dielectric layer is integrated in the first main surface area. A compensation structure with a compensation layer is integrated in the second main surface area. The ratio between a surface enlargement of the second main surface area effected by the compensation structure corresponds to at least 30% of the surface enlargement of the first main surface area effected by the capacitor structure.
Public/Granted literature
- US20160365408A1 INTEGRATED CAPACITOR AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-12-15
Information query
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