Invention Grant
- Patent Title: Semiconductor device and method of formation
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Application No.: US14321983Application Date: 2014-07-02
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Publication No.: US09917169B2Publication Date: 2018-03-13
- Inventor: Ming-Han Liao
- Applicant: Taiwan Semiconductor Manufacturing Company Limited , National Taiwan University
- Applicant Address: TW Hsin-Chu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LIMITED
- Current Assignee Address: TW Hsin-Chu
- Agency: Cooper Legal Group, LLC
- Main IPC: H01L27/12
- IPC: H01L27/12 ; H01L29/423 ; H01L29/786 ; H01L29/66

Abstract:
A semiconductor device and method of formation are provided. The semiconductor device includes a channel surrounding a dielectric tube and a gate surrounding the channel. The dielectric tube comprises a high dielectric constant material that has or conducts few to no carriers, such as electrons or holes. The presence of the dielectric tube confines carriers to the channel, which is in close proximity to the gate. The proximity of the channel, and the carriers therein, to the gate affords greater control to the gate over the carriers, thus allowing a length of the channel to be decreased while experiencing little to no short channel effects, such as current leakage through the channel.
Public/Granted literature
- US20160005830A1 SEMICONDUCTOR DEVICE AND METHOD OF FORMATION Public/Granted day:2016-01-07
Information query
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