Invention Grant
- Patent Title: Piezoelectric element, method of manufacturing piezoelectric element, piezoelectric actuator, and electronic apparatus
-
Application No.: US15354349Application Date: 2016-11-17
-
Publication No.: US09917245B2Publication Date: 2018-03-13
- Inventor: Makoto Kubota , Takanori Matsuda , Kaoru Miura
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: JP Tokyo
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: JP Tokyo
- Agency: Fitzpatrick, Cella, Harper & Scinto
- Priority: JP2015-231845 20151127
- Main IPC: B41J2/045
- IPC: B41J2/045 ; H01L41/187 ; B06B1/06 ; B41J2/14 ; H01L41/047 ; H01L41/08 ; H01L41/09 ; H01L41/27 ; H01L41/297 ; H02N2/18 ; H03H9/64 ; A61B8/00 ; G01C19/56 ; G02B26/04 ; H01L41/318

Abstract:
Provided is a piezoelectric element including a substrate, electrodes, and a piezoelectric film, the piezoelectric film including an oxide including Ba, Ca, Ti, and Zr, and at least one element of Mn and Bi in which: 0.09≦x≦0.30 is satisfied, where x is a mole ratio of Ca to a sum of Ba and Ca; 0.025≦y≦0.085 is satisfied, where y is a mole ratio of Zr to a sum of Ti, Zr, and Sn; and 0≦z≦0.02 is satisfied, where z is a mole ratio of Sn to the sum of Ti, Zr, and Sn; a total content Save of Mn and Bi is 0.0020 moles or more and 0.0150 moles or less for 1 mole of the oxide; and a total content Sbou of Mn and Bi in a region of the piezoelectric film adjacent to one of the electrodes is smaller than Save.
Public/Granted literature
Information query
IPC分类: