Invention Grant
- Patent Title: Templates for patterned media
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Application No.: US14728908Application Date: 2015-06-02
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Publication No.: US09928867B2Publication Date: 2018-03-27
- Inventor: Shuaigang Xiao , XiaoMin Yang , ZhaoNing Yu , Yautzong Hsu
- Applicant: Seagate Technology LLC
- Applicant Address: US CA Cupertino
- Assignee: Seagate Technology LLC
- Current Assignee: Seagate Technology LLC
- Current Assignee Address: US CA Cupertino
- Main IPC: G11B5/855
- IPC: G11B5/855 ; G11B5/74 ; H01L21/00 ; H01L21/302 ; G03F7/00

Abstract:
Provided herein are apparatuses and methods, including patterning a first set of features in a servo zone to form a patterned servo zone while a first mask protects a data zone from the patterning. The first mask may be removed from the data zone. The apparatuses and methods may further include patterning a second set of features in the data zone to form a patterned data zone while a second mask protects the patterned servo zone from the patterning.
Public/Granted literature
- US20150262606A1 TEMPLATES FOR PATTERNED MEDIA Public/Granted day:2015-09-17
Information query
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