A multi level multileaf collimator employs leaves with leaf tips having a non-square shape in a beam's eye view to improve beam shaping effect and penumbra performance. The multi level multileaf collimator includes a first multileaf collimator in a first level comprising beam blocking leaves longitudinally movable in a first direction, and a second multileaf collimator in a second level comprising beam blocking leaves longitudinally movable in a second direction. The first direction may be generally parallel with the second direction and the leaves of the first multileaf collimator may laterally offset the leaves of the second multileaf collimator. The beam blocking leaves of the first multileaf collimator may comprise an end portion having a non-square shape in a beam's eye view.