Integrated ultrasound transducer
Abstract:
An ultrasonic transmitter includes a piezoelectric integrated thin film transistor (PITFT). The transistor includes a top gate electrode, a bottom gate electrode, and a piezoelectric layer. The piezoelectric layer generates vibrations in response to a voltage applied across the top gate electrode and the bottom gate electrode. The transistor includes micro-electrical-mechanical systems (MEMS) mechanically coupled to the PITFT. The MEMS includes a resonator that transmits ultrasonic pressure waves based on the vibrations.
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