Substrate mark detection apparatus and substrate mark detection method
Abstract:
A substrate mark detection apparatus includes: a detecting module, configured to detect a depth at which a mark is embedded in a substrate to be detected and determine whether the substrate is valid or not according to the depth at which the mark is embedded in the substrate; an information extracting module, configured to parse the mark to obtain parsed information in a case where the substrate is valid, query pre-stored information corresponding to the mark, determine whether the parsed information conforms to the pre-stored information or not, and if yes, to extract the pre-stored information and output the pre-stored information; a sorting module, configured to remove the substrate in a case where the substrate is invalid or the parsed information does not conform to the pre-stored information.
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