Invention Grant
- Patent Title: Polishing pad with grooved foundation layer and polishing surface layer
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Application No.: US14727586Application Date: 2015-06-01
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Publication No.: US09931729B2Publication Date: 2018-04-03
- Inventor: Paul Andre Lefevre , William C. Allison , Diane Scott , James P. LaCasse
- Applicant: NexPlanar Corporation
- Applicant Address: US IL Aurora
- Assignee: Cabot Microelectronics Corporation
- Current Assignee: Cabot Microelectronics Corporation
- Current Assignee Address: US IL Aurora
- Agent Thomas Omholt; Erika S. Wilson
- Main IPC: B24B37/26
- IPC: B24B37/26 ; B24B37/16 ; B24B37/24 ; B24B37/20 ; B24B37/22 ; B24D18/00

Abstract:
Polishing pads with grooved foundation layers and polishing surface layers are described. In an example, a polishing pad for polishing a substrate includes a foundation layer having a pattern of grooves disposed therein. A continuous polishing surface layer is attached to the pattern of grooves of the foundation layer. In another example, a polishing pad for polishing a substrate includes a foundation layer with a surface having a pattern of protrusions disposed thereon. Each protrusion has a top surface and sidewalls. A non-continuous polishing surface layer is attached to the foundation layer and includes discrete portions. Each discrete portion is attached to the top surface of a corresponding one of the protrusions of the foundation layer. Methods of fabricating polishing pads with a polishing surface layer bonded to a grooved foundation layer are also described.
Public/Granted literature
- US20150266160A1 POLISHING PAD WITH GROOVED FOUNDATION LAYER AND POLISHING SURFACE LAYER Public/Granted day:2015-09-24
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