Invention Grant
- Patent Title: Automatic handling apparatus with positioning pins
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Application No.: US15314982Application Date: 2015-05-13
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Publication No.: US09931730B2Publication Date: 2018-04-03
- Inventor: Taichi Yasuda , Tatsuo Enomoto
- Applicant: SHIN-ETSU HANDOTAI CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee: SHIN-ETSU HANDOTAI CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2014-123518 20140616
- International Application: PCT/JP2015/002425 WO 20150513
- International Announcement: WO2015/194092 WO 20151223
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B24B37/27 ; H01L21/68 ; H01L21/02 ; B25J15/06 ; B25J9/04 ; B25J9/10

Abstract:
Automatic handling apparatus having a suction-head sucking and holding a workpiece, an arm is connected to and moves the suction-head, and a stage on which the workpiece to be carried to the carrier holding hole is mounted, the suction-head has a movable section which is movable within a parallel plane to the suction-head body, the movable section to suck and hold the workpiece, and has positioning pins stretched in vertically lower direction and, at loading time, the workpiece held by the movable section into the carrier holding hole, the positioning pins are appressed against tooth-bottoms of a gear on the carrier outer periphery and movable section moving within the parallel plane. The carrier is pushed against the sun gear side to fix the carrier position and direction, and the held workpiece is carried into the holding hole. Consequently, the automatic handling apparatus load the workpiece into the carrier holding hole.
Public/Granted literature
- US20170190019A1 AUTOMATIC HANDLING APPARATUS Public/Granted day:2017-07-06
Information query
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