Invention Grant
- Patent Title: Vapor deposition and vapor deposition method
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Application No.: US14590491Application Date: 2015-01-06
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Publication No.: US09932672B2Publication Date: 2018-04-03
- Inventor: Choel-Min Jang , Myung-Soo Huh , Jeong-Ho Yi , Cheol-Rae Jo , Sang-Joon Seo , Seung-Hun Kim , Jin-Kwang Kim
- Applicant: Samsung Display Co., Ltd.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., Ltd.
- Current Assignee: Samsung Display Co., Ltd.
- Current Assignee Address: KR Yongin-si
- Agency: H.C. Park & Associates, PLC
- Priority: KR10-2012-0006409 20120119
- Main IPC: C23C16/455
- IPC: C23C16/455 ; C23C16/458 ; C23C16/46

Abstract:
A vapor deposition apparatus includes a stage on which a substrate is mounted; a heater unit that is disposed at a side of the stage and includes a first heater and a second heater, wherein the first heater and the second heater are movable so that the first heater and the second heater are spaced apart from each other or are disposed adjacent to each other; and a nozzle unit that is disposed at a side opposite to the side at which the heater unit is disposed about the stage and includes one or more nozzles.
Public/Granted literature
- US20150144062A1 VAPOR DEPOSITION AND VAPOR DEPOSITION METHOD Public/Granted day:2015-05-28
Information query
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