- Patent Title: Method for producing group III nitride semiconductor single crystal
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Application No.: US15239584Application Date: 2016-08-17
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Publication No.: US09932688B2Publication Date: 2018-04-03
- Inventor: Miki Moriyama
- Applicant: TOYODA GOSEI CO., LTD.
- Applicant Address: JP Kiyosu-Shi, Aichi-Ken
- Assignee: TOYODA GOSEI CO., LTD.
- Current Assignee: TOYODA GOSEI CO., LTD.
- Current Assignee Address: JP Kiyosu-Shi, Aichi-Ken
- Agency: McGinn IP Law Group, PLLC
- Priority: JP2015-167169 20150826; JP2016-152819 20160803
- Main IPC: C30B9/12
- IPC: C30B9/12 ; H01L21/66 ; C30B29/40 ; H01L21/02

Abstract:
The present techniques provide a method for producing a Group III nitride semiconductor single crystal that is designed to grow a semiconductor single crystal with high reproducibility. The method for producing a Group III nitride semiconductor single crystal comprises adding a seed crystal substrate, Ga, and Na into a crucible, and growing a Group III nitride semiconductor single crystal. In the growth of the Group III nitride semiconductor single crystal, a measuring device is used to detect the reaction of Ga with Na. Ga is reacted with Na with the temperature of the crucible adjusted within a first temperature range of 80° C. to 200° C. After the measuring device detected the reaction of Ga with Na, the temperature of the crucible is elevated up to a growth temperature of the Group III nitride semiconductor single crystal.
Public/Granted literature
- US20170058425A1 METHOD FOR PRODUCING GROUP III NITRIDE SEMICONDUCTOR SINGLE CRYSTAL Public/Granted day:2017-03-02
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