Invention Grant
- Patent Title: N-type MOSFET and method for manufacturing the same
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Application No.: US14494447Application Date: 2014-09-23
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Publication No.: US09934975B2Publication Date: 2018-04-03
- Inventor: Huilong Zhu , Qiuxia Xu , Yanbo Zhang , Hong Yang
- Applicant: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: CN201210505745 20121130
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L29/66 ; H01L29/49 ; H01L29/51

Abstract:
An N-type MOSFET and a method for manufacturing the same are disclosed. In one aspect, the method comprises forming source/drain regions in a semiconductor substrate. The method also includes forming an interfacial oxide layer on the semiconductor substrate. The method also includes forming a high-k gate dielectric layer on the interfacial oxide layer. The method also includes forming a first metal gate layer on the high-k gate dielectric layer. The method also includes implanting dopants into the first metal gate layer through conformal doping. The method also includes annealing a gate stack to change an effective work function of the gate stack which includes the first metal gate layer, the high-k gate dielectric, and the interfacial oxide layer.
Public/Granted literature
- US20150008537A1 N-TYPE MOSFET AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2015-01-08
Information query
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