Invention Grant
- Patent Title: Methods of forming vertical transistor devices with different effective gate lengths
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Application No.: US15436281Application Date: 2017-02-17
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Publication No.: US09935018B1Publication Date: 2018-04-03
- Inventor: Ruilong Xie , Chun-Chen Yeh , Tenko Yamashita , Kangguo Cheng
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L27/00 ; H01L29/00 ; H01L21/8238 ; H01L21/324 ; H01L21/306 ; H01L21/308 ; H01L29/66 ; H01L27/092 ; H01L29/78 ; H01L29/423

Abstract:
One illustrative method disclosed herein includes, among other things, forming first and second vertically-oriented channel (VOC) semiconductor structures for, respectively, first and second vertical transistor devices, and forming first and second top spacers, respectively, around the first and second VOC structures, wherein the first spacer thickness is greater than the second spacer thickness. In this example, the method also includes performing at least one epitaxial deposition process to form a first top source/drain structure around the first VOC structure and above the first top spacer and a second top source/drain structure around the second VOC structure and above the second top spacer, and performing an anneal process so as to cause dopants in the first and second doped top source/drain structures to migrate into, respectively, the first and second VOC structures.
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