Invention Grant
- Patent Title: Dynamic memory structure
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Application No.: US15594668Application Date: 2017-05-15
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Publication No.: US09935109B2Publication Date: 2018-04-03
- Inventor: Nicky Lu , Ming-Hong Kuo
- Applicant: Etron Technology, Inc.
- Applicant Address: TW Hsinchu
- Assignee: Etron Technology, Inc.
- Current Assignee: Etron Technology, Inc.
- Current Assignee Address: TW Hsinchu
- Agent Winston Hsu
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/423 ; H01L49/02

Abstract:
A dynamic memory structure is disclosed. The dynamic memory structure includes: a substrate; a first strip semiconductor material disposed on the substrate and extending along a first direction; a gate standing astride the first strip semiconductor material, extending along a second direction and dividing the first strip semiconductor material into a first source terminal, a first drain terminal and a first channel region; a first dielectric layer sandwiched between the gate and the first strip semiconductor material; a first capacitor unit disposed on the substrate and comprising the first source terminal serving as a bottom electrode, a second dielectric layer covering the first source terminal to serve as a capacitor dielectric layer and a capacitor metal layer covering the second dielectric layer to serve as a top electrode. Preferably, the first source terminal and the first drain terminal have asymmetric shapes.
Public/Granted literature
- US20170250185A1 DYNAMIC MEMORY STRUCTURE Public/Granted day:2017-08-31
Information query
IPC分类: