Invention Grant
- Patent Title: Vertical memory cell string with dielectric in a portion of the body
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Application No.: US15255402Application Date: 2016-09-02
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Publication No.: US09935171B2Publication Date: 2018-04-03
- Inventor: Haitao Liu , Akira Goda , Chandra Mouli , Krishna K. Parat
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Schwegman Lundberg & Woessner, P.A.
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/40 ; H01L29/788 ; H01L29/792 ; H01L27/11556 ; H01L27/11582 ; H01L27/11524 ; H01L27/1157

Abstract:
Some embodiments include a memory cell string having a body having a channel extending therein and in contact with a source/drain, a select gate adjacent to the body, a plurality of access lines adjacent to the body, and a dielectric in a portion of the body between the source/drain and a level corresponding to an end of the plurality of access lines most adjacent to the select gate. The dielectric in the portion of the body does not extend along an entire length of the body. Other embodiments are described and claimed.
Public/Granted literature
- US20160372556A1 VERTICAL MEMORY CELL STRING WITH DIELECTRIC IN A PORTION OF THE BODY Public/Granted day:2016-12-22
Information query
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