Piezoelectric composition, piezoelectric element and sputtering target
Abstract:
The present invention aims to provide a piezoelectric composition containing a composition represented by formula (5) as the main component, wherein the composition represented by formula (5) contains a first perovskite-type oxide represented by formula (1), a second perovskite-type oxide represented by formula (2), a tungsten bronze-type oxide represented by formula (3) and a third perovskite-type oxide represented by formula (4), (K1-x-yNaxLiy)q(Nb1-zTaz)O3 (1), SrZrO3 (2), Ba(Nb1-wTaw)2O6 (3), (Bi0.5Na0.5)TiO3 and/or (Bi0.5K0.5)TiO3 (4), (1−m−n−p)A+mB+nC+pD (5); in formula (1), 0.20≤x≤0.80, 0.02≤y≤0.10, 0.01≤z≤0.30 and 0.800≤q≤1.050; in formula (3), 0.01≤w≤0.30; and in formula (5), A represents the composite oxide represented by formula (1), B represents the composite oxide represented by formula (2), C represents the composite oxide represented by formula (3), D represents the composite oxide represented by formula (4), and 0.04≤m≤0.07, 0≤n≤0.010 and 0.001≤p≤0.020.
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