Microelectromechanical systems (MEMS) microphone array with dedicated amplifiers
Abstract:
Microelectromechanical systems (MEMS) acoustic sensors are implemented with dedicated preamplifiers. Provided implementations can comprise an array of MEMS acoustic sensor elements each having a dedicated preamplifier. A summation node can add outputs of each preamplifier and an analog to digital converter (ADC) can receive the summed outputs. Other implementations can comprise an array of MEMS acoustic sensors each having dedicated preamplifiers. Some of the preamplifiers receive an invert signal and an ADC can subtract inverted signals from non-inverted signals.
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