Invention Grant
- Patent Title: Method for forming a doped silicon ingot of uniform resistivity
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Application No.: US14437955Application Date: 2013-10-23
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Publication No.: US09938639B2Publication Date: 2018-04-10
- Inventor: Jordi Veirman , Sébastien Dubois , Nicolas Enjalbert
- Applicant: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Oliff PLC
- Priority: FR1202826 20121023
- International Application: PCT/FR2013/000276 WO 20131023
- International Announcement: WO2014/064347 WO 20140501
- Main IPC: C30B33/02
- IPC: C30B33/02 ; B28D1/22 ; G01N27/04 ; B28D5/00 ; C30B29/06 ; F27D19/00 ; F27D21/00

Abstract:
A method for forming a silicon ingot includes the following steps: providing a silicon ingot of variable electrical resistivity and containing interstitial oxygen, determining the interstitial oxygen concentration in different areas of the silicon ingot, calculating the concentration of thermal donors to be created in the different areas to reach a target value of the electrical resistivity, and subjecting the different areas of the silicon ingot to annealing so as to form the thermal donors. The annealing temperature in each area is determined from the thermal donor and interstitial oxygen concentrations of the area and from a predefined annealing time.
Public/Granted literature
- US20150284875A1 METHOD FOR FORMING A DOPED SILICON INGOT OF UNIFORM RESISTIVITY Public/Granted day:2015-10-08
Information query
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