Invention Grant
- Patent Title: Cryopump system and method for controlling the cryopump system
-
Application No.: US13137896Application Date: 2011-09-21
-
Publication No.: US09938968B2Publication Date: 2018-04-10
- Inventor: Masamichi Ando
- Applicant: Masamichi Ando
- Applicant Address: JP Tokyo
- Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee: SUMITOMO HEAVY INDUSTRIES, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2010-211282 20100921
- Main IPC: B01D8/00
- IPC: B01D8/00 ; F04B37/08 ; F04B49/06

Abstract:
A cryopump system includes: a plurality of cryopumps; a plurality of compressor units arranged to operate in parallel in accordance with a control output, respectively, to supply refrigerant gas to the plurality of cryopumps; and a cryopump controller operative to determine the control output for each of the plurality of compressor units. The cryopump controller adjusts a preset value for at least one of the compressor units, the preset value being utilized to determine the control output, so that operation statuses of the respective compressor units are substantially equalized.
Public/Granted literature
- US20120067065A1 Cryopump system and method for controlling the cryopump system Public/Granted day:2012-03-22
Information query