Invention Grant
- Patent Title: Removable isolation valve shield insert assembly
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Application No.: US15052519Application Date: 2016-02-24
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Publication No.: US09939084B2Publication Date: 2018-04-10
- Inventor: Brian Weed
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: F16K51/02
- IPC: F16K51/02 ; F16K1/42 ; F16K3/02 ; F16K27/04 ; H01L21/67

Abstract:
An isolation valve is provided, along with removable shield insert assemblies for an isolation valve. In one embodiment, a shield insert assembly for an isolation valve is provided that includes a graphite first shield insert having a flat ring shape. The first shield insert has a circular outer diameter. An elongated aperture is formed through the first shield insert. At least two fastener holes are formed through the first shield insert configured to couple the first shield insert to a first shield support.
Public/Granted literature
- US20160169412A1 REMOVABLE ISOLATION VALVE SHIELD INSERT ASSEMBLY Public/Granted day:2016-06-16
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