Invention Grant
- Patent Title: Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body
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Application No.: US14844032Application Date: 2015-09-03
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Publication No.: US09939268B2Publication Date: 2018-04-10
- Inventor: Makoto Furuhata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-181048 20140905
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/574
Abstract:
A physical quantity sensor element is formed into a plane-shape which extends along an XY plane, and is provided with a driving portion which vibrates in a Z-axis direction, a detecting portion which vibrates in an X-axis direction due to Coriolis effect acting on the driving portion, a beam portion which connects the driving portion and the detecting portion, a fixing portion, and a beam portion which connects the detecting portion and the fixing portion, in which a spring constant of the beam portion in the Z-axis direction is smaller than a spring constant of the beam portion in the Z-axis direction, and a spring constant of the beam portion in the Z-axis direction is greater than a spring constant of the beam portion in the X-axis direction.
Public/Granted literature
- US20160069683A1 PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY Public/Granted day:2016-03-10
Information query
IPC分类:
