Invention Grant
- Patent Title: Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body
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Application No.: US14844049Application Date: 2015-09-03
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Publication No.: US09939269B2Publication Date: 2018-04-10
- Inventor: Makoto Furuhata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-181046 20140905
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/574

Abstract:
A physical quantity sensor element of the invention is formed into a plane-shape along an XY plane, and is provided with two driving portions which vibrate in a Z-axis direction, two detecting portions, four beam portions which connect one driving portion and one detecting portion, four beam portions which connect the other detecting portion and the other driving portion, and a coupling portion of which one end is connected to a portion in one of the driving portion and the other end is connected to a portion in the other diving portion in which the each of the deriving portions includes a beam portion which is connected to the end portion of the coupling portion and is deformable so as to reduce a change of a posture of each of the driving portions with respect to an XY plane.
Public/Granted literature
- US20160069684A1 PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY Public/Granted day:2016-03-10
Information query
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