Invention Grant
- Patent Title: Physical quantity sensor element, physical quantity sensor, electronic equipment, and movable body
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Application No.: US14844639Application Date: 2015-09-03
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Publication No.: US09939270B2Publication Date: 2018-04-10
- Inventor: Makoto Furuhata
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2014-181047 20140905
- Main IPC: G01C19/5747
- IPC: G01C19/5747 ; G01C19/574
Abstract:
A physical quantity sensor element is provided with a detecting portion, a driving portion, a beam portion which connects a detecting portion and the driving portion to each other, and in which the beam portion includes a branched portion. The beam portion includes two mass portion side beam portions which extend from two position of the driving portion, which are different from each other, and two supporting portion side beam portions which extend from two positions of the detecting portion, which are different from each other, and in which both end portions on the detecting portion side of two mass portion side beam portions are connected to each other, and both end portions on the driving portion side of two supporting portion side beam portions are connected to each other.
Public/Granted literature
- US20160069685A1 PHYSICAL QUANTITY SENSOR ELEMENT, PHYSICAL QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND MOVABLE BODY Public/Granted day:2016-03-10
Information query
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