Invention Grant
- Patent Title: Encoder device, method for measuring moving amount, optical apparatus, exposure apparatus, exposure method and method for producing device
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Application No.: US13678857Application Date: 2012-11-16
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Publication No.: US09939293B2Publication Date: 2018-04-10
- Inventor: Zhigiang Liu
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Staas & Halsey LLP
- Priority: JP2011-251986 20111117
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03B27/68 ; G01D5/34 ; G03B27/58 ; G01D5/347 ; G01D5/38 ; G03F7/20

Abstract:
An encoder, which measures a relative moving amount of a second member relative to a first member, includes: a diffraction grating provided on the first member; a light-incident optical member causing a measuring light to come into a grating pattern surface of the diffraction grating substantially perpendicularly; a first reflecting member provided on the second member and reflecting a diffracted light generated from the diffraction grating; a first direction-changing member changing a direction of the diffracted light; a first photo-detector detecting an interference light generated by interference between a double diffracted light and other diffracted light than the double diffracted light or a reference light, the double diffracted light being generated, via diffraction of the diffracted light, from the diffraction grating; and a measuring section which obtains the relative moving amount of the second member relative to the first member by using a detection signal from the first photo-detector.
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