Hot-type fluid measurement device with electronic elements
Abstract:
In order to achieve measurement with high precision by suitably correcting a measurement error, a hot-type fluid measurement device includes a module having a passage section and a circuit chamber, a sensor element disposed in the passage section, and a circuit element disposed in the circuit chamber. The circuit element includes a correction section that corrects flow rate information detected by the sensor element from temperature difference information of a temperature of a fluid and a temperature of the module, and at least one temperature of the temperature of the fluid or the temperature of the module.
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