Invention Grant
- Patent Title: Physical quantity detection element, physical quantity detection device, electronic apparatus, and moving object
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Application No.: US14504894Application Date: 2014-10-02
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Publication No.: US09939457B2Publication Date: 2018-04-10
- Inventor: Shota Kigure
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2013-207963 20131003
- Main IPC: G01P15/125
- IPC: G01P15/125 ; G01P1/00 ; G01P15/08

Abstract:
A physical quantity detection element includes: a substrate; first and second fixed electrode portions on the substrate; a movable body on the upper portion of the substrate; and a beam on the movable body, the movable body includes a first movable body on a first side of the beam, and a second movable body on a second side of the beam, the first movable body includes a first movable electrode portion facing the first fixed electrode portion and a first mass portion disposed in an opposite direction of the beam from the first movable electrode portion, the second movable body includes a second movable electrode portion facing the second fixed electrode portion, a mass of the first movable body is greater than a mass of the second movable body, and a mass of the first mass portion is greater than a mass of the first movable electrode portion.
Public/Granted literature
Information query
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