Invention Grant
- Patent Title: Scanning probe system with multiple probes
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Application No.: US15617402Application Date: 2017-06-08
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Publication No.: US09939460B2Publication Date: 2018-04-10
- Inventor: Andrew Humphris
- Applicant: INFINITESIMA LIMITED
- Applicant Address: GB Abingdon
- Assignee: INFINITESIMA LIMITED
- Current Assignee: INFINITESIMA LIMITED
- Current Assignee Address: GB Abingdon
- Agency: Marshall, Gerstein & Borun LLP
- Priority: GB1610128.9 20160610
- Main IPC: G01Q30/00
- IPC: G01Q30/00 ; G01Q20/00

Abstract:
A method of operating a scanning probe system that includes a probe support and probes carried by the probe support is disclosed. Each probe includes a cantilever extending from the support to a free end and a tip carried by the free end. The system is operated to perform interaction cycles, each including in an approach phase, moving the support so that the tips move together towards the sample surface; in a detection step, generating a surface signal on detection of an interaction of the tip(s) of a first subset of the probes with the sample surface before the rest of the probes have interacted with the sample; in a response step changing a shape of the cantilever(s) of the first subset in response to the generation of the surface signal; and in a retract phase moving the support so that the tips retract together away from the sample surface.
Public/Granted literature
- US20170356931A1 Scanning Probe System with Multiple Probes Public/Granted day:2017-12-14
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