- Patent Title: Integrated time dependent dielectric breakdown reliability testing
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Application No.: US15403462Application Date: 2017-01-11
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Publication No.: US09939486B2Publication Date: 2018-04-10
- Inventor: Jifeng Chen , Dirk Pfeiffer , Thomas M. Shaw , Peilin Song , Franco Stellari
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Daniel P. Morris
- Main IPC: G01R31/28
- IPC: G01R31/28 ; G01R31/311

Abstract:
Methods for reliability testing include applying a stress voltage to a device under test (DUT); measuring a leakage current across the DUT; triggering measurement of optical emissions from the DUT based on the timing of the measurement of the leakage current; and correlating measurements of the leakage current with measurements of the optical emissions to determine a time and location of a defect occurrence within the DUT by locating instances of increased noise in the leakage current that correspond in time with instances of increased optical emissions.
Public/Granted literature
- US20170122999A1 INTEGRATED TIME DEPENDENT DIELECTRIC BREAKDOWN RELIABILITY TESTING Public/Granted day:2017-05-04
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