- Patent Title: Nitridized ruthenium layer for formation of cobalt interconnects
-
Application No.: US15413367Application Date: 2017-01-23
-
Publication No.: US09941213B2Publication Date: 2018-04-10
- Inventor: Daniel C Edelstein , Chih-Chao Yang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Jeffrey S LaBaw; Steven J Meyers
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/532 ; H01L23/528 ; H01L21/285 ; H01L21/768 ; H01L23/522

Abstract:
An advanced metal conductor structure is described. An integrated circuit device including a substrate having a dielectric layer is patterned. The pattern includes a set of features in the dielectric for a set of metal conductor structures. An adhesion promoting layer is disposed over the set of features in the patterned dielectric. A nitridized ruthenium layer is disposed over the adhesion promoting layer. A cobalt layer disposed over the nitridized ruthenium layer filling the set of features, wherein the cobalt layer is formed using a physical vapor deposition process.
Public/Granted literature
- US20180053726A1 NITRIDIZED RUTHENIUM LAYER FOR FORMATION OF COBALT INTERCONNECTS Public/Granted day:2018-02-22
Information query
IPC分类: