Invention Grant
- Patent Title: Method for manufacturing thin film solar cell
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Application No.: US14803843Application Date: 2015-07-20
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Publication No.: US09941423B2Publication Date: 2018-04-10
- Inventor: Jeung-hyun Jeong , Won Mok Kim , Jong-Keuk Park
- Applicant: Korea Institute of Science and Technology
- Applicant Address: KR Seoul
- Assignee: Korea Institute of Science and Technology
- Current Assignee: Korea Institute of Science and Technology
- Current Assignee Address: KR Seoul
- Agency: NSIP Law
- Priority: KR10-2014-0150130 20141031
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L31/0463 ; H01L31/0224 ; H01L31/0749

Abstract:
A method for manufacturing a thin film solar cell includes: depositing a transparent first rear electrode on a first surface of a transparent substrate; depositing a second rear electrode having a high-conductive metal on the first rear electrode; performing a first laser scribing process to separate a double layer of the first and second rear electrodes; depositing a light absorption layer having selenium (Se) or sulfur (S) on the second rear electrode; performing a second laser scribing process by inputting a laser to a second surface of the transparent substrate to separate the light absorption layer; depositing a transparent electrode on the light absorption layer; and performing a third laser scribing process by inputting a laser to the second surface to separate the transparent electrode. Accordingly, patterning may be performed in a substrate-incident laser manner to improve price, productivity and precision of the patterning process.
Public/Granted literature
- US20160126376A1 METHOD FOR MANUFACTURING THIN FILM SOLAR CELL AND MODULE STRUCTURE OF THIN FILM SOLAR CELL Public/Granted day:2016-05-05
Information query
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