Invention Grant
- Patent Title: Method for randomly texturing a semiconductor substrate
-
Application No.: US15316387Application Date: 2015-06-02
-
Publication No.: US09941445B2Publication Date: 2018-04-10
- Inventor: Ludovic Escoubas , Gerard Jean Louis Berginc , Jean-Jacques Simon , Vincent Brissonneau
- Applicant: UNIVERSITÉ D'AIX-MARSEILLE , CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE , THALES
- Applicant Address: FR Marseilles FR Paris FR Neuilly sur Seine
- Assignee: UNIVERSITÉ D'AIX-MARSEILLE,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,THALES
- Current Assignee: UNIVERSITÉ D'AIX-MARSEILLE,CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE,THALES
- Current Assignee Address: FR Marseilles FR Paris FR Neuilly sur Seine
- Agency: Oliff PLC
- Priority: FR1455068 20140604
- International Application: PCT/IB2015/054176 WO 20150602
- International Announcement: WO2015/186064 WO 20151210
- Main IPC: H01L33/22
- IPC: H01L33/22 ; H01L27/146 ; H01L31/0236

Abstract:
The invention relates to a method for texturing a semiconductor substrate (1), comprising steps consisting in forming a plurality of cavities of random shapes, depths and distribution, in an etch mask (2), by means of non-homogeneous reactive-ion etching, forming a first rough random design, and etching the substrate using the etch mask, by means of reactive-ion etching, in such a way as to transfer the first rough random design into the substrate and to produce a second rough random design (200), comprising cavities (20) of random shapes, depths (d2r) and distribution, on the surface of the substrate.
Public/Granted literature
- US20170141264A1 METHOD FOR RANDOMLY TEXTURING A SEMICONDUCTOR SUBSTRATE Public/Granted day:2017-05-18
Information query
IPC分类: