Invention Grant
- Patent Title: Integrated circuit cooling using embedded peltier micro-vias in substrate
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Application No.: US14850993Application Date: 2015-09-11
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Publication No.: US09941458B2Publication Date: 2018-04-10
- Inventor: Jeffrey P. Gambino , Richard S. Graf , Sudeep Mandal
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Michael A. Petrocelli
- Main IPC: H01L35/34
- IPC: H01L35/34 ; H01L35/32

Abstract:
A semiconductor device package and method for manufacturing the same, includes a semiconductor substrate including a plurality of embedded thermoelectric couples. The embedded thermoelectric couples can be in trenches and extend partially into the substrate from the handle side of the substrate. An n-type pillar and a p-type pillar are electrically connected using a conducting contact plate to form each of the partially embedded thermoelectric couples. A series connection layer electrically connects the plurality of thermoelectric couples on the handle side. A power source provides electrical current to the series connection layer allowing current to flow through the plurality of the series connected thermoelectric couples. A heat sink is positioned adjacent to the connected thermoelectric couples for transferring heat away from the device side to the heat sink using the thermoelectric couples.
Public/Granted literature
- US20160293825A1 INTEGRATED CIRCUIT COOLING USING EMBEDDED PELTIER MICRO-VIAS IN SUBSTRATE Public/Granted day:2016-10-06
Information query
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