Invention Grant
- Patent Title: Method of manufacturing a PCRAM memory
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Application No.: US15348426Application Date: 2016-11-10
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Publication No.: US09941471B2Publication Date: 2018-04-10
- Inventor: Gabriele Navarro
- Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1560903 20151113
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L45/00 ; H01L27/24

Abstract:
A method for manufacturing a PCRAM memory includes forming in a first dielectric layer arranged on a substrate, which includes bottom electrodes, a first rectilinear trench opening onto the set of electrodes; depositing a first active layer in the first trench, such that the first active layer is in electrical contact with the electrodes; covering the first active layer with a second dielectric layer; etching, in the second and second dielectric layers and the first active layer, additional rectilinear trenches oriented perpendicularly to the first trench, to obtain a group of memory devices each including a portion of the first active layer in electrical contact with one of the electrodes; filling the additional trenches with a sacrificial dielectric material; performing an anisotropic etching of the sacrificial material to expose a side surface of each portion of the first active layer; and covering the side surface with a second active layer.
Public/Granted literature
- US20170141307A1 METHOD OF MANUFACTURING A PCRAM MEMORY Public/Granted day:2017-05-18
Information query
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