Invention Grant
- Patent Title: Ultrasonic transducer and ultrasonic diagnostic equipment using the same
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Application No.: US13879439Application Date: 2011-10-13
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Publication No.: US09941817B2Publication Date: 2018-04-10
- Inventor: Taiichi Takezaki , Shuntaro Machida
- Applicant: Taiichi Takezaki , Shuntaro Machida
- Applicant Address: JP Tokyo
- Assignee: HITACHI, LTD.
- Current Assignee: HITACHI, LTD.
- Current Assignee Address: JP Tokyo
- Agency: Baker Botts L.L.P.
- Priority: JP2010-232618 20101015
- International Application: PCT/JP2011/073582 WO 20111013
- International Announcement: WO2012/050172 WO 20120419
- Main IPC: H02N1/08
- IPC: H02N1/08 ; A61B8/00 ; B06B1/02 ; G01N29/24 ; H04R19/04

Abstract:
High transfer sound pressure and high reception sensitivity are realized, and reliability is improved in terms of long term operation, in a capacitive detector-type ultrasonic transducer (CMUT). The ultrasonic transducer, which has a lower electrode (201), a hollow portion (202) that is formed on the lower electrode and surrounded by insulating films (209,208), an upper electrode (205) that is formed on the hollow portion, and a plurality of insulating film projections (204) that are formed in the hollow portion (202), comprises a plurality of rigid members (203) that are formed on the hollow portion, either the lower electrode (201) and/or the upper electrode (205) is disposed in a position that does not overlap with the insulating film projections (204) when viewed from the upper surface by carving out the portion that overlaps with the insulating film projections (204), and the respective rigid members (203) are disposed such that a region is present that overlaps with the insulating film projections (204) when viewed from the upper surface.
Public/Granted literature
- US20130241345A1 ULTRASONIC TRANSDUCER AND ULTRASONIC DIAGNOSTIC EQUIPMENT USING THE SAME Public/Granted day:2013-09-19
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