Invention Grant
- Patent Title: Device for generating vapor from solid or liquid starting material for CVD or PVD apparatus
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Application No.: US14788626Application Date: 2015-06-30
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Publication No.: US09942946B2Publication Date: 2018-04-10
- Inventor: Michael Long , Andreas Poqué , Claudia Cremer , Birgit Irmgard Beccard , Karl-Heinz Trimborn
- Applicant: AIXTRON SE
- Applicant Address: DE Herzogenrath
- Assignee: AIXTRON SE
- Current Assignee: AIXTRON SE
- Current Assignee Address: DE Herzogenrath
- Agency: Ascenda Law Group, PC
- Priority: DE102014109196 20140701
- Main IPC: H05B3/02
- IPC: H05B3/02 ; H05B3/00 ; C23C14/12 ; C23C14/24 ; C23C14/26 ; C23C16/448 ; C23C16/455 ; H05B3/06

Abstract:
In a device for generating a vapor for a CVD or PVD apparatus, at least two thermal transfer bodies are arranged successively in the direction of flow of a carrier gas. The device also includes an inlet pipe for feeding an aerosol to one of the thermal transfer bodies for vaporization of the aerosol by bringing the aerosol particles into contact with thermal transfer surfaces of the thermal transfer body. At least one of the thermal transfer bodies has an opening for an inlet pipe that has a first flow channel for feeding the aerosol in and a second flow channel for feeding a carrier gas in. Gas passage openings are provided through which the carrier gas flows out of the second flow channel into the first flow channel. The second flow channel is sealed in the area of the mouth of the inlet pipe.
Public/Granted literature
- US20160007410A1 DEVICE FOR GENERATING VAPOR FROM SOLID OR LIQUID STARTING MATERIAL FOR CVD OR PVD APPARATUS Public/Granted day:2016-01-07
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